EQ-TM106 Film Thickness Online Monitor Analyzer

Brief introduction

EQ-TM106 film thickness monitor is the principle of quartz crystal oscillation, combined with advanced frequency measurement technology, the film thickness on line monitoring. Mainly used in MBE, OLED thermal evaporation, magnetron sputtering and other equipment of the film preparation process, the film thickness and coating rate for real-time monitoring. According to the real time speed, the PWM analog quantity can be output, and the closed loop speed control of the evaporation source can be achieved by the use of the film thickness sensor and the regulating instrument and the evaporation power source.

Features

1, the machine can be connected with the computer.

2, a display instrument has the interface is simple and intuitive and reasonable, the operation is convenient, intuitive display of the measured film thickness, velocity, frequency, PWM

Control output the percentage of working state.

3, through the software or display device can control the time, the output mode, rate algorithm, material parameters, output range and communication parameters, and so on.

The measured data can be written to the Excel file.

4, has the advantages of small size, high measurement accuracy, simple operation, easy to use, etc..

Technical parameter

1, power: DC 5V (+ 10%), maximum current 400mA

2, frequency resolution: + 0.03Hz

3, the film thickness resolution: 0.0136 a (AL)

4, film thickness accuracy: + 0.5%, depending on the process conditions, especially the location of the sensor, material stress, temperature and density

5, measuring speed: 100ms-1s/ times, can be set

6, measuring range: 500000 a (AL)

7, standard sensor crystal: 6MHz

8, computer interface: RS-232/485 serial interface (1200, 2400, 4800 baud rate, 9600, 19200, 38400 can be set,

Data: 8, stop: 1, check: no)

9, analog output: 8 bit resolution, PWM pulse width modulation output (open collector or internal 5V output)

10, the working environment: temperature 0-50, humidity 5%-85%RH, no condensation

11, size: 90mm * 50mm * 18mm

Dear customer:

You see on our website products quotation, just a market reference price. We can according to customer specific requirements to give the actual price.

Dear customer:

We ,Xi’an Yima Opto-electrical Technology Com.,Ltd. is an integrated economic entity of R&D,manufacturing and trading with over 20 years of history .

Our business scope covers various fields such as biochemical analysis,environmental protection,industrial testing, bioscience,medical apparatus and instruments,internet technology and some frontier science.

Through a long-time development,we own a national resources system of various professional talents , abundant supply for various components &parts and special materials, full producing &processing equipments , strong Technological standardization and a complete quality assurance system.

If you need OEM or ODM in manufacturing ,scientific research , market development and or you want to build your own brand in your country, it’s our honor to cooperate with you.In this way ,we have developed many products for our customers from the USA, Europe and South Africa and got good feedback on Alibaba.

We firmly believe that science and technology is no boundaries.

 Our mission is to make every effort to contribute to all humanity.